@misc{indiciae292333346f3c,
  title = {Scalable Multiple Patterning Layout Decomposition Implemented by a Distribution Evolutionary Algorithm},
  author = {Yu Chen and Yongjian Xu and Ning Xu},
  year = {2023},
  url = {https://arxiv.org/abs/2304.04207},
  note = {Source identifier: 2304.04207}
}