TY  - RPRT
TI  - Scalable Multiple Patterning Layout Decomposition Implemented by a Distribution Evolutionary Algorithm
AU  - Yu Chen
AU  - Yongjian Xu
AU  - Ning Xu
PY  - 2023
UR  - https://arxiv.org/abs/2304.04207
ID  - 2304.04207
ER  -