@misc{indiciae8248d73d903f, title = {Accelerated deep self-supervised ptycho-laminography for three-dimensional nanoscale imaging of integrated circuits}, author = {Iksung Kang and Yi Jiang and Mirko Holler and Manuel Guizar-Sicairos and A. F. J. Levi and Jeffrey Klug and Stefan Vogt and George Barbastathis}, year = {2023}, doi = {10.1364/optica.492666}, url = {https://arxiv.org/abs/2304.04597}, note = {Source identifier: 2304.04597} }