TY  - RPRT
TI  - Accelerated deep self-supervised ptycho-laminography for three-dimensional nanoscale imaging of integrated circuits
AU  - Iksung Kang
AU  - Yi Jiang
AU  - Mirko Holler
AU  - Manuel Guizar-Sicairos
AU  - A. F. J. Levi
AU  - Jeffrey Klug
AU  - Stefan Vogt
AU  - George Barbastathis
PY  - 2023
DO  - 10.1364/optica.492666
UR  - https://arxiv.org/abs/2304.04597
ID  - 2304.04597
ER  -