@misc{indiciaed99a188e86fe, title = {A robust design of time-varying internal model principle-based control for ultra-precision tracking in a direct-drive servo stage}, author = {Yue Cao and Zhen Zhang}, year = {2023}, doi = {10.1016/j.mechatronics.2024.103249}, url = {https://arxiv.org/abs/2304.06451}, note = {Source identifier: 2304.06451} }