TY - RPRT TI - A robust design of time-varying internal model principle-based control for ultra-precision tracking in a direct-drive servo stage AU - Yue Cao AU - Zhen Zhang PY - 2023 DO - 10.1016/j.mechatronics.2024.103249 UR - https://arxiv.org/abs/2304.06451 ID - 2304.06451 ER -