@misc{indiciae9775b3312634,
  title = {Stepwise fabrication and optimization of coplanar waveguide resonator hybrid devices},
  author = {N. Kellner and N. Hüttner and M. Will and P. Hakonen and A. K. Hüttel},
  year = {2023},
  doi = {10.1002/pssb.202300187},
  url = {https://arxiv.org/abs/2304.08997},
  note = {Source identifier: 2304.08997}
}