@misc{indiciae900b58222d9b,
  title = {In-situ study and modeling of the reaction kinetics during molecular beam epitaxy of GeO2 and its etching by Ge},
  author = {Wenshan Chen and Kingsley Egbo and Hans Tornatzky and Manfred Ramsteiner and Markus R. Wagner and Oliver Bierwagen},
  year = {2023},
  doi = {10.1063/5.0155869},
  url = {https://arxiv.org/abs/2304.11097},
  note = {Source identifier: 2304.11097}
}