TY  - RPRT
TI  - In-situ study and modeling of the reaction kinetics during molecular beam epitaxy of GeO2 and its etching by Ge
AU  - Wenshan Chen
AU  - Kingsley Egbo
AU  - Hans Tornatzky
AU  - Manfred Ramsteiner
AU  - Markus R. Wagner
AU  - Oliver Bierwagen
PY  - 2023
DO  - 10.1063/5.0155869
UR  - https://arxiv.org/abs/2304.11097
ID  - 2304.11097
ER  -