@misc{indiciae0c39380d1e96,
  title = {Metal Inter-layer Via Keep-out-zone in M3D IC: A Critical Process-aware Design Consideration},
  author = {Madhava Sarma Vemuri and Umamaheswara Rao Tida},
  year = {2023},
  url = {https://arxiv.org/abs/2304.13808},
  note = {Source identifier: 2304.13808}
}