@misc{indiciae22fb7dff26e2,
  title = {Scalable and efficient grating couplers on low-index photonic platforms enabled by cryogenic deep silicon etching},
  author = {Emma Lomonte and Maik Stappers and Linus Krämer and Wolfram H. P. Pernice and Francesco Lenzini},
  year = {2023},
  url = {https://arxiv.org/abs/2305.00907},
  note = {Source identifier: 2305.00907}
}