TY  - RPRT
TI  - Scalable and efficient grating couplers on low-index photonic platforms enabled by cryogenic deep silicon etching
AU  - Emma Lomonte
AU  - Maik Stappers
AU  - Linus Krämer
AU  - Wolfram H. P. Pernice
AU  - Francesco Lenzini
PY  - 2023
UR  - https://arxiv.org/abs/2305.00907
ID  - 2305.00907
ER  -