@misc{indiciaede05c14d03ff,
  title = {Creation of Material Functions by Nanostructuring},
  author = {Marek Mezera and Camilo Florian and Gert-willem Römer and Jörg Krüger and Jörn Bonse},
  year = {2023},
  doi = {10.1007/978-3-031-14752-4\_23},
  url = {https://arxiv.org/abs/2305.02641},
  note = {Source identifier: 2305.02641}
}