@misc{indiciae76db012b25e9,
  title = {Atomic Layer Deposited Protective Coating of Aluminum Oxide on Silver-based Telescope Mirror A Comparison Between a Pure Ozone and H2O Precursor},
  author = {Søren A. Tornøe and Brandon Cheney and Brian Dupraw and Yoshimasa Okamura and Andrew C. Phillips and Takayuki Hagiwara and Tetsuya Nishiguchi and Nobuhiko P. Kobayashi},
  year = {2023},
  doi = {10.1117/1.jatis.10.4.044007},
  url = {https://arxiv.org/abs/2305.05109},
  note = {Source identifier: 2305.05109}
}