TY - RPRT TI - Dispersive readout of a silicon quantum device using an atomic force microscope-based rf gate sensor AU - Artem O. Denisov AU - Gordian Fuchs AU - Seong W. Oh AU - Jason R. Petta PY - 2023 DO - 10.1063/5.0158196 UR - https://arxiv.org/abs/2305.05571 ID - 2305.05571 ER -