@misc{indiciaeaff2b44c17ed,
  title = {Reactive pulsed direct current magnetron sputtering deposition of semiconducting yttrium oxide thin film in ultralow oxygen atmosphere: A spectroscopic and structural investigation of growth dynamics},
  author = {H. Arslan and I. Aulika and A. Sarakovskis and L. Bikse and M. Zubkins and A. Azarov and J. Gabrusenoks and J. Purans},
  year = {2023},
  doi = {10.1016/j.vacuum.2023.111942},
  url = {https://arxiv.org/abs/2305.06757},
  note = {Source identifier: 2305.06757}
}