TY  - RPRT
TI  - Reactive pulsed direct current magnetron sputtering deposition of semiconducting yttrium oxide thin film in ultralow oxygen atmosphere: A spectroscopic and structural investigation of growth dynamics
AU  - H. Arslan
AU  - I. Aulika
AU  - A. Sarakovskis
AU  - L. Bikse
AU  - M. Zubkins
AU  - A. Azarov
AU  - J. Gabrusenoks
AU  - J. Purans
PY  - 2023
DO  - 10.1016/j.vacuum.2023.111942
UR  - https://arxiv.org/abs/2305.06757
ID  - 2305.06757
ER  -