@misc{indiciaef7de1b350019,
  title = {High Density Fabrication Process for Single Flux Quantum Circuits},
  author = {D. Yohannes and M. Renzullo and J. Vivalda and A. C. Jacobs and M. Yu and J. Walter and A. F. Kirichenko and I. V. Vernik and O. A. Mukhanov},
  year = {2023},
  doi = {10.1063/5.0152552},
  url = {https://arxiv.org/abs/2305.07607},
  note = {Source identifier: 2305.07607}
}