@misc{indiciae42bec8ab4efe,
  title = {Disorder and cavity evolution in single-crystalline Ge during implantation of Sb ions monitored in-situ by spectroscopic ellipsometry},
  author = {Tivadar Lohner and Attila Nemeth and Zsolt Zolnai and Benjamin Kalas and Alekszej Romanenko and Nguyen Quoc Khanh and Edit Szilagyi and Endre Kotai and Emil Agocs and Zsolt Toth and Judit Budai and Peter Petrik and Miklos Fried and Istvan Barsony and Jozsef Gyulai},
  year = {2023},
  doi = {10.1016/j.mssp.2022.107062},
  url = {https://arxiv.org/abs/2305.07635},
  note = {Source identifier: 2305.07635}
}