@misc{indiciae13bfb823f803,
  title = {Direct atomic layer deposition of ultra-thin \$Al\_\{2\}O\_\{3\}\$ and \$HfO\_\{2\}\$ films on gold-supported monolayer \$MoS\_\{2\}\$},
  author = {E. Schilirò and S. E. Panasci and A. M. Mio and G. Nicotra and S. Agnello and B. Pecz and G. Z. Radnoczi and I. Deretzis and A. La Magna and F. Roccaforte and R. Lo Nigro and F. Giannazzo},
  year = {2023},
  doi = {10.1016/j.apsusc.2023.157476},
  url = {https://arxiv.org/abs/2305.07933},
  note = {Source identifier: 2305.07933}
}