@misc{indiciae17c7f7098faa,
  title = {Orientation dependent etching of silicon by fluorine molecules: a quantum chemistry computational study},
  author = {Omesh Dhar Dwivedi and Yuri Barsukov and Sierra Jubin and Joseph Vella and Igor Kaganovich},
  year = {2023},
  url = {https://arxiv.org/abs/2305.09037},
  note = {Source identifier: 2305.09037}
}