TY  - RPRT
TI  - Orientation dependent etching of silicon by fluorine molecules: a quantum chemistry computational study
AU  - Omesh Dhar Dwivedi
AU  - Yuri Barsukov
AU  - Sierra Jubin
AU  - Joseph Vella
AU  - Igor Kaganovich
PY  - 2023
UR  - https://arxiv.org/abs/2305.09037
ID  - 2305.09037
ER  -