@misc{indiciae2a5e4546f709,
  title = {Fabrication of Al/AlOx/Al junctions with high uniformity and stability on sapphire substrates},
  author = {Yuzhen Zheng and Shuming Li and Zengqian Ding and Kanglin Xiong and Jiagui Feng and Hui Yang},
  year = {2024},
  doi = {10.1038/s41598-023-39052-2},
  url = {https://arxiv.org/abs/2305.10956},
  note = {Source identifier: 2305.10956}
}