@misc{indiciae34190230b59c, title = {Ultrashort Pulse Laser Annealing of Amorphous Atomic Layer Deposited MoS\$\_2\$ Films}, author = {Malte J. M. J. Becher and Julia Jagosz and Rahel-Manuela Neubieser and Jan-Lucas Wree and Anjana Devi and Marvin Michel and Claudia Bock and Evgeny L. Gurevich and Andreas Ostendorf}, year = {2023}, doi = {10.1002/adem.202300677}, url = {https://arxiv.org/abs/2305.11008}, note = {Source identifier: 2305.11008} }