@misc{indiciae123711094a7d,
  title = {Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission},
  author = {Davi M. Febba and Kevin R. Talley and Kendal Johnson and Stephen Schaefer and Sage R. Bauers and John S. Mangum and Rebecca W. Smaha and Andriy Zakutayev},
  year = {2023},
  doi = {10.1063/5.0159406},
  url = {https://arxiv.org/abs/2305.11122},
  note = {Source identifier: 2305.11122}
}