TY  - RPRT
TI  - Autonomous sputter synthesis of thin film nitrides with composition controlled by Bayesian optimization of optical plasma emission
AU  - Davi M. Febba
AU  - Kevin R. Talley
AU  - Kendal Johnson
AU  - Stephen Schaefer
AU  - Sage R. Bauers
AU  - John S. Mangum
AU  - Rebecca W. Smaha
AU  - Andriy Zakutayev
PY  - 2023
DO  - 10.1063/5.0159406
UR  - https://arxiv.org/abs/2305.11122
ID  - 2305.11122
ER  -