@misc{indiciae8040cce238b8,
  title = {Stable and low loss oxide layer on α-Ta (110) film for superconducting qubits},
  author = {Zengqian Ding and Boyi zhou and Tao Wang and Lina Yang and Yanfu Wu and Xiao Cai and Kanglin Xiong and Jiagui Feng},
  year = {2024},
  doi = {10.1116/6.0003368},
  url = {https://arxiv.org/abs/2305.11395},
  note = {Source identifier: 2305.11395}
}