TY  - RPRT
TI  - Study of Synchronous RF Pulsing in Dual Frequency Capacitively Coupled Plasma
AU  - Abhishek Verma
AU  - Shahid Rauf
AU  - Kallol Bera
AU  - D. Sydorenko
AU  - A. Khrabrov
AU  - I. Kaganovich
PY  - 2023
UR  - https://arxiv.org/abs/2305.15482
ID  - 2305.15482
ER  -