@misc{indiciae9f45a34bb564,
  title = {Determination of compressive stress in thin films using micro-machined buckled membranes},
  author = {C. Malhaire and M. Granata and D. Hofman and A. Amato and V. Martinez and G. Cagnoli and A. Lemaitre and N. Shcheblanov},
  year = {2023},
  doi = {10.1116/6.0002590},
  url = {https://arxiv.org/abs/2305.15794},
  note = {Source identifier: 2305.15794}
}