@misc{indiciae6c382bffa063, title = {Silicon photonic MEMS switches based on split waveguide crossings}, author = {Yinpeng Hu and Yi Sun and Ye Lu and Huan Li and Liu Liu and Yaocheng Shi and Daoxin Dai}, year = {2024}, url = {https://arxiv.org/abs/2305.17366}, note = {Source identifier: 2305.17366} }