@misc{indiciae0812ed4b6ce6,
  title = {Fabrication of thin diamond membranes by Ne\$\textasciicircum{}+\$ implantation},
  author = {Luca Basso and Michael Titze and Jacob Henshaw and Pauli Kehayias and Rong Cong and Maziar Saleh Ziabari and Tzu-Ming Lu and Michael P. Lilly and Andrew M. Mounce},
  year = {2023},
  url = {https://arxiv.org/abs/2305.19133},
  note = {Source identifier: 2305.19133}
}