@misc{indiciaec036f01bad7f, title = {Roadmap for focused ion beam technologies}, author = {Katja Höflich and Gerhard Hobler and Frances I. Allen and Tom Wirtz and Gemma Rius and Lisa McElwee-White and Arkady V. Krasheninnikov and Matthias Schmidt and Ivo Utke and Nico Klingner and Markus Osenberg and Rosa Córdoba and Flyura Djurabekova and Ingo Manke and Philip Moll and Mariachiara Manoccio and José Marıa De Teresa and Lothar Bischoff and Johann Michler and Olivier De Castro and Anne Delobbe and Peter Dunne and Oleksandr V. Dobrovolskiy and Natalie Frese and Armin Gölzhäuser and Paul Mazarov and Dieter Koelle and Wolfhard Möller and Francesc Pérez-Murano and Patrick Philipp and Florian Vollnhals and Gregor Hlawacek}, year = {2023}, url = {https://arxiv.org/abs/2305.19631}, note = {Source identifier: 2305.19631} }