@misc{indiciaeb824d804f5ac, title = {Combinatorial Reactive Sputtering with Auger Parameter Analysis Enables Synthesis of Wurtzite Zn2TaN3}, author = {Siarhei Zhuk and Alexander Wieczorek and Amit Sharma and Jyotish Patidar and Kerstin Thorwarth and Johann Michler and Sebastian Siol}, year = {2023}, doi = {10.1021/acs.chemmater.3c01341}, url = {https://arxiv.org/abs/2305.19875}, note = {Source identifier: 2305.19875} }