TY  - RPRT
TI  - A fast and accurate computation method for reflective diffraction simulations
AU  - Shuhei Kudo
AU  - Yusaku Yamamoto
AU  - Takeo Hoshi
PY  - 2023
UR  - https://arxiv.org/abs/2306.00271
ID  - 2306.00271
ER  -