TY  - RPRT
TI  - Direct Implicit and Explicit Energy-Conserving Particle-in-Cell Methods for Modeling of Capacitively-Coupled Plasma Devices
AU  - Haomin Sun
AU  - Soham Banerjee
AU  - Sarveshwar Sharma
AU  - Andrew Tasman Powis
AU  - Alexander V. Khrabrov
AU  - Dmytro Sydorenko
AU  - Jian Chen
AU  - Igor D. Kaganovich
PY  - 2023
UR  - https://arxiv.org/abs/2306.01581
ID  - 2306.01581
ER  -