@misc{indiciaec246146af3a3, title = {High-quality amorphous Silicon Carbide for hybrid photonic integration at low temperature}, author = {Bruno Lopez-Rodriguez and Roald Van Der Kolk and Samarth Aggarwal and Naresh Sharma and Zizheng Li and Daniel Van Der Plaats and Thomas Scholte and Jin Chang and Silvania F. Pereira and Simon Groeblacher and Harish Bhaskaran and Iman Esmaeil Zadeh Zadeh}, year = {2023}, url = {https://arxiv.org/abs/2306.04491}, note = {Source identifier: 2306.04491} }