@misc{indiciae62b4d6dfabde,
  title = {Effects of thermal annealing on thermal conductivity of LPCVD silicon carbide thin films},
  author = {Lei Tang and Chris Dames},
  year = {2023},
  url = {https://arxiv.org/abs/2306.04960},
  note = {Source identifier: 2306.04960}
}