TY  - RPRT
TI  - Particle-in-cell simulation of a 50~mTorr capacitively coupled argon discharge over a range of frequencies
AU  - Saurabh Simha
AU  - Sarveshwar Sharma
AU  - Alexander Khrabrov
AU  - Igor Kaganovich
AU  - Jonathan Poggie
AU  - Sergey Macheret
PY  - 2023
UR  - https://arxiv.org/abs/2306.05386
ID  - 2306.05386
ER  -