TY - RPRT TI - Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching AU - Chuntao Li AU - Jianglin Guan AU - Jintian Lin AU - Renhong Gao AU - Min Wang AU - Lingling Qiao AU - Li Deng AU - Ya Cheng PY - 2023 UR - https://arxiv.org/abs/2306.10504 ID - 2306.10504 ER -