@misc{indiciae333b5b9ac7c4,
  title = {Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers},
  author = {André Hochreiter and Fabian Groß and Morris-Niklas Möller and Michael Krieger and Heiko B. Weber},
  year = {2023},
  doi = {10.1038/s41598-023-46110-2},
  url = {https://arxiv.org/abs/2306.12311},
  note = {Source identifier: 2306.12311}
}