TY  - RPRT
TI  - Electrochemical etching strategy for shaping monolithic 3D structures from 4H-SiC wafers
AU  - André Hochreiter
AU  - Fabian Groß
AU  - Morris-Niklas Möller
AU  - Michael Krieger
AU  - Heiko B. Weber
PY  - 2023
DO  - 10.1038/s41598-023-46110-2
UR  - https://arxiv.org/abs/2306.12311
ID  - 2306.12311
ER  -