@misc{indiciae64bd9b3b1461,
  title = {Nitrogen flow rate dependent atomic coordination, phonon vibration and surface analysis of DC Magnetron sputtered Nitrogen rich-AlN thin films},
  author = {Aishwarya Madhuri and Sanketa Jena and Mukul Gupta and Bibhu Prasad Swain},
  year = {2023},
  doi = {10.1016/j.physb.2023.415141},
  url = {https://arxiv.org/abs/2306.12694},
  note = {Source identifier: 2306.12694}
}