TY  - RPRT
TI  - Nitrogen flow rate dependent atomic coordination, phonon vibration and surface analysis of DC Magnetron sputtered Nitrogen rich-AlN thin films
AU  - Aishwarya Madhuri
AU  - Sanketa Jena
AU  - Mukul Gupta
AU  - Bibhu Prasad Swain
PY  - 2023
DO  - 10.1016/j.physb.2023.415141
UR  - https://arxiv.org/abs/2306.12694
ID  - 2306.12694
ER  -