@misc{indiciaedd1d064cb938, title = {Coherent X-ray Spectroscopy Elucidates Nanoscale Dynamics of Plasma-Enhanced Thin-Film Growth}, author = {Peco Myint and Jeffrey M. Woodward and Chenyu Wang and Xiaozhi Zhang and Lutz Wiegart and Andrei Fluerasu and Randall L. Headrick and Charles R. Eddy, Jr. and Karl F. Ludwig}, year = {2023}, url = {https://arxiv.org/abs/2306.13779}, note = {Source identifier: 2306.13779} }