@misc{indiciaede5175469f82,
  title = {Investigation of the Boron removal effect induced by 5.5 MeV electrons on highly doped EPI- and Cz-silicon},
  author = {Chuan Liao and Eckhart Fretwurst and Erika Garutti and Joern Schwandt and Leonid Makarenko and Ioana Pintilie and Lucian Dragos Filip and Anja Himmerlich and Michael Moll and Yana Gurimskaya and Zheng Li},
  year = {2023},
  doi = {10.1016/j.nima.2023.168559},
  url = {https://arxiv.org/abs/2306.14736},
  note = {Source identifier: 2306.14736}
}