TY  - RPRT
TI  - Investigation of the Boron removal effect induced by 5.5 MeV electrons on highly doped EPI- and Cz-silicon
AU  - Chuan Liao
AU  - Eckhart Fretwurst
AU  - Erika Garutti
AU  - Joern Schwandt
AU  - Leonid Makarenko
AU  - Ioana Pintilie
AU  - Lucian Dragos Filip
AU  - Anja Himmerlich
AU  - Michael Moll
AU  - Yana Gurimskaya
AU  - Zheng Li
PY  - 2023
DO  - 10.1016/j.nima.2023.168559
UR  - https://arxiv.org/abs/2306.14736
ID  - 2306.14736
ER  -