@misc{indiciaef077040e62fe,
  title = {PECVD and PEALD on polymer substrates (Part II): Understanding and tuning of barrier and membrane properties of thin films},
  author = {Teresa de los Arcos and Peter Awakowicz and Marc Böke and Nils Boysen and Ralf Peter Brinkmann and Rainer Dahlmann and Anjana Devi and Denis Eremin and Jonas Franke and Tobias Gergs and Jonathan Jenderny and Efe Kemaneci and Thomas D. Kühne and Simon Kusmierz and Thomas Mussenbrock and Jens Rubner and Jan Trieschmann and Matthias Wessling and Xiaofan Xie and David Zanders and Frederik Zysk and Guido Grundmeier},
  year = {2023},
  url = {https://arxiv.org/abs/2306.14797},
  note = {Source identifier: 2306.14797}
}