@misc{indiciaebb16fa63a6c8,
  title = {Non-invasive digital etching of van der Waals semiconductors},
  author = {Jian Zhou and Chunchen Zhang and Li Shi and Xiaoqing Chen Tae-Soo Kim and Minseung Gyeon and Jian Chen Jinlan Wang and Linwei Yu Xinran Wang Kibum Kang and Emanuele Orgiu and Paolo Samorì and Kenji Watanabe and Takashi Taniguchi and Kazuhito Tsukagoshi and Peng Wang and Yi Shi and Songlin Li},
  year = {2023},
  doi = {10.1038/s41467-022-29447-6},
  url = {https://arxiv.org/abs/2306.15139},
  note = {Source identifier: 2306.15139}
}