@misc{indiciae178829b01511, title = {Microwave characterization of tantalum superconducting resonators on silicon substrate with niobium buffer layer}, author = {Yoshiro Urade and Kay Yakushiji and Manabu Tsujimoto and Takahiro Yamada and Kazumasa Makise and Wataru Mizubayashi and Kunihiro Inomata}, year = {2024}, doi = {10.1063/5.0165137}, url = {https://arxiv.org/abs/2306.15258}, note = {Source identifier: 2306.15258} }