TY  - RPRT
TI  - Microwave characterization of tantalum superconducting resonators on silicon substrate with niobium buffer layer
AU  - Yoshiro Urade
AU  - Kay Yakushiji
AU  - Manabu Tsujimoto
AU  - Takahiro Yamada
AU  - Kazumasa Makise
AU  - Wataru Mizubayashi
AU  - Kunihiro Inomata
PY  - 2024
DO  - 10.1063/5.0165137
UR  - https://arxiv.org/abs/2306.15258
ID  - 2306.15258
ER  -